turbomolecular pump
A turbomolecular pump is a type of vacuum pump that uses high-speed rotating blades to move gas molecules from the inlet to the exhaust. It operates by creating a pressure difference, allowing it to efficiently remove gas from a sealed chamber. This makes it ideal for applications requiring ultra-high vacuum conditions, such as in semiconductor manufacturing and mass spectrometry.
The pump consists of multiple stages, each with a rotor and stator. As the rotor spins, it imparts momentum to the gas molecules, pushing them toward the exhaust. This design enables the turbomolecular pump to achieve very low pressures, making it essential in various scientific and industrial processes.