Plasma sources are devices that generate plasma, a state of matter consisting of charged particles, including ions and electrons. These sources can be used in various applications, such as semiconductor manufacturing, surface treatment, and plasma displays. Common types of plasma sources include DC glow discharges, radio frequency (RF) sources, and microwave plasma sources.
Plasma sources operate by applying energy to a gas, causing it to ionize and form plasma. The generated plasma can be controlled and manipulated for specific purposes, such as etching materials or enhancing chemical reactions. Understanding plasma sources is essential for advancements in fields like materials science and space exploration.