Microwave plasma sources are devices that generate plasma using microwave radiation. Plasma, a state of matter similar to gas but consisting of charged particles, is created when microwave energy ionizes a gas, such as argon or helium. These sources are commonly used in various applications, including materials processing, surface treatment, and semiconductor manufacturing. The operation of microwave plasma sources typically involves a microwave generator, a waveguide, and a plasma chamber. The microwave energy is transmitted through the waveguide and into the chamber, where it interacts with the gas to produce plasma. This technology is valued for its efficiency and ability to operate at low pressures.